Abstract—Carbon 3D structures were obtained by spray pyrolysis using toluene solution containing suspended nickel or magnesium phthalocyanines as precursors of metallic particles serving as catalysts for carbon phase formation. The process was conducted in a range of temperatures in a quartz tube in inert atmosphere on borosilicate glass supports where the nanometric layers of nanoparticles were deposited. The samples were analyzed by Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), Infrared Spectroscopy Fourier Transform (FTIR) and Raman spectroscopy; their condusctivity was measured via Kelvin technique. The properties of formed nanolayers were analyzed according to metal nature in the phthalocyanine, temperature, carrier gas speed, and other process parameters. Possible MEMS applications of thus fabricated nanolayers are discussed.
Keywords—carbon nanotubes,phthalocyanines, Raman, spray pyrolysis, TEM.
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